Micro corner cube array, method of making the micro corner cube array, and display device

ABSTRACT

A method of making a micro corner cube array includes the steps of: providing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to { 111 } planes of the crystals; and dry-etching the surface of the substrate anisotropically with an etching gas that is reactive with the substrate, thereby forming a plurality of unit elements of the micro corner cube array on the surface of the substrate. Each of the unit elements is made up of a number of crystal planes that have been etched at a lower etch rate than the { 111 } planes of the crystals.

This application is a Divisional of application Ser. No. 10/315,192,filed Dec. 10, 2002, now U.S. Pat. No. 7,098,137, the entire content ofwhich is hereby incorporated herein by reference in this application.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a method of making a micro corner cubearray and to a display device including the micro corner cube array.

2. Description of the Related Art

In recent years, various types of optical elements having extremelysmall sizes (i.e., so-called “micro optical elements”), includingmicrolenses, micro mirrors and micro prisms, have been developed andapplied more and more extensively to the fields of opticalcommunications and display devices. It is expected that the opticaltechnology and display technology will be further developed and advancedby realizing those micro optical elements.

Examples of such optical elements include a corner cube reflector, whichis formed by arranging a plurality of corner cubes in a regular pattern.Each of those corner cubes has a shape corresponding to one corner of acube and three perpendicularly opposed reflective planes. The cornercube reflector is a type of retroreflector for reflecting an incominglight ray back to its source by getting the light ray reflected by eachone of those reflective planes after another. The corner cube reflectorcan always reflect the incoming light ray back to its sourceirrespective of its angle of incidence. Hereinafter, conventionalmethods of making a corner cube will be described.

Plate Method

In a plate method, a number of flat plates, each having two mutuallyparallel planes, are stacked one upon the other. At the side end face ofthese flat plates stacked, V-grooves are cut vertically to the parallelplanes at an equal pitch, thereby forming a series of roof-shapedprotrusions, each having an apical angle of approximately 90 degrees.Next, each of these flat plates is horizontally shifted with respect toadjacent one of them such that the tops of the series of roof-shapedprotrusions, formed on the former plate, are aligned with the bottoms ofthe V-grooves formed on the latter plate. In this manner, a die for useto make a corner cube array is obtained. In the plate method, a cornercube array is made by using this die. According to this method, however,it is necessary to accurately shift and secure the flat plate having theroof-shaped protrusions with respect to the adjacent flat plate suchthat these two plates satisfy a required positional relationship. Thus,it is difficult to make a corner cube of as small a size as about 100 μmor less by this method.

Pin Bundling Method

In a pin bundling method, the end of a hexagonal columnar metal pin isprovided with a prism having three square facets that are opposedsubstantially perpendicularly to each other, and a number of such pinsare bundled together to make a collection of prisms. In this manner, acorner cube is made up of three facets of three prisms that are formedat the respective ends of three adjacent pins. According to this method,however, a corner cube should be made by collecting multiple prisms thathave been separately formed for mutually different pins. Thus, it isactually difficult to make a corner cube of a small size. The minimumpossible size of a corner cube that can be formed by this method isabout 1 mm.

Triangular Prism Method

In a triangular prism method, V-grooves are cut on the surface of a flatplate of a metal, for example, in three directions, thereby forming aplurality of triangular pyramidal protrusions and obtaining a collectionof prisms. However, the prisms to be formed by this method can have noother shape but the triangular pyramidal shape.

Furthermore, Japanese Laid-Open Publication No. 7-205322 discloses amethod of making a micro corner cube array by a photochemical technique.In this method, a mask having a plurality of equilateral triangulartransparent (or opaque) regions is used. Each of these transparent (oropaque) regions of this mask has variable transmittance (or opacity)that gradually decreases from its center toward its periphery. Byperforming exposing and developing process steps with such a mask, anumber of triangular pyramidal photoresist pattern elements are formedon a substrate. Then, the substrate, which is partially covered withthose photoresist pattern elements, is etched anisotropically (e.g., dryetched) so as to have a plurality of protrusions in the same shape asthe photoresist pattern elements. In this manner, multiple triangularpyramidal protrusions, each having three isosceles triangular facetsthat are opposed substantially perpendicularly to each other, are formedon the substrate.

A liquid crystal display device, which uses such a corner cube reflectoras a retroreflector, is described in U.S. Pat. No. 5,182,663, forexample. Hereinafter, a conventional liquid crystal display deviceincluding such a corner cube reflector will be described with referenceto FIG. 11.

In the liquid crystal display device 900 shown in FIG. 11, a scatteringtype liquid crystal layer 60 is sandwiched between two transparentsubstrates 80 and 90, which are closer to, and more distant from, theviewer (not shown), respectively, and will be herein referred to as a“viewer-side substrate” and a “non-viewer-side substrate”, respectively.On one surface of the non-viewer-side substrate 90 that is opposed tothe liquid crystal layer 60, a corner cube reflector 95 used as aretroreflector and a transparent electrode 65 are provided in thisorder. On the other hand, on one surface of the viewer-side substrate 80that is opposed to the liquid crystal layer 60, a color filter layer 70and another transparent electrode 65 are provided in this order. Byapplying a predetermined voltage or no voltage from the pair oftransparent electrodes 65, which sandwiches the scattering type liquidcrystal layer 60 between them, to the liquid crystal layer 60, theliquid crystal layer 60 can switch between transmitting and scatteringstates. When color white should be displayed, the scattering type liquidcrystal layer 60 is switched into the scattering state. In this mode,part of the incoming light, which has been incident from an externallight source (e.g., the sun) onto the scattering type liquid crystallayer 60, is scattered by the liquid crystal layer 60. Another part ofthe incoming light is reflected back from the corner cube reflector 95and then scattered by the liquid crystal layer 60. By getting theincoming light scattered in this manner, a bright image can bedisplayed. On the other hand, when color black should be displayed, thescattering type liquid crystal layer 60 is switched into thetransmitting state. In this mode, part of the incoming light that hasbeen transmitted through the scattering type liquid crystal layer 60 isreflected back to its source by the corner cube reflector 95.Accordingly, just a part of the light that has been emitted from a lightsource near the viewer reaches his or her eyes, thus realizing gooddisplay of color black. In addition, no regularly reflected part of theambient light reaches the viewer's eyes. As a result, the unwanted backreflection of the surrounding sight is avoidable.

In this liquid crystal display device 900, the size L1 of each unitelement (i.e., each corner cube) of the corner cube reflector 95 needsto be equal to or smaller than the size L2 of each pixel region. Thereason is as follows. If the size L1 of each unit element is greaterthan the size L2 of each pixel region, then a light ray, which has beentransmitted through a predetermined pixel region and thenretro-reflected from the corner cube reflector, may pass through anotherpixel region on the way back. In that case, the display operation maynot be conducted as intended.

As described above, a corner cube for use in a liquid crystal displaydevice, for example, needs to have a very small size (e.g., about 100 μmor less, which is even smaller than the size of a pixel region).However, according to any of the above-described mechanical methods ofmaking corner cubes, it is often difficult to make corner cubes of sucha small size as intended due to some variations that should occur in anactual manufacturing process. Also, even if corner cubes of a very smallsize are obtained successfully by one of the methods described above,each reflective plane of the corner cubes should have a low specularreflectivity and the radius R of curvature at each intersection betweentwo reflective planes should be great. As a result, the efficiency ofretro-reflection may decrease disadvantageously.

Also, as for a micro corner cube obtained by a photochemical method asdisclosed in Japanese Laid-Open Publication No. 7-205322, it isdifficult to ensure high plane precision (i.e., planarity) for each sidesurface (or reflective plane) thereof. In that method, the planeprecision of each side surface of a micro corner cube depends on that ofa triangular pyramidal photoresist pattern element formed on thesubstrate. However, to increase the plane precision of the photoresistpattern element, the processing steps of exposing and developing thephotoresist layer should be controlled strictly enough by making thevariation in transmittance or opacity of the mask constant, for example.Actually, though, such strict process control is hard to realize.Furthermore, according to this technique, every corner cube must be madeup of three rectangular isosceles triangular planes.

SUMMARY OF THE INVENTION

In order to overcome the problems described above, an object of thepresent invention is to provide a method of making a micro corner cubearray with a very small size and sufficiently high shape precision.

Another object of the present invention is to provide a display devicethat uses such a micro corner cube array.

A preferred embodiment of the present invention provides a method ofmaking a micro corner cube array. The method preferably includes thesteps of a) providing a substrate, at least a surface portion of whichconsists of cubic single crystals and which has a surface that issubstantially parallel to {111} planes of the crystals, and b)dry-etching the surface of the substrate anisotropically with an etchinggas that is reactive with the substrate, thereby forming a plurality ofunit elements of the micro corner cube array on the surface of thesubstrate. Each of the unit elements is preferably made up of a numberof crystal planes that have been etched at a lower etch rate than the{111} planes of the crystals.

In one preferred embodiment of the present invention, the step b)preferably includes the step of exposing {100} planes of the crystals atthe lower etch rate than the {111} planes thereof.

In this particular preferred embodiment, the step b) preferably includesthe step of forming the unit elements such that each of the unitelements is made up of three {100} planes that are opposed substantiallyperpendicularly to each other.

Alternatively or additionally, at least the surface portion of thesubstrate prepared in the step a) is preferably made of a compoundsemiconductor having a sphalerite structure.

In that case, the compound semiconductor is preferably gallium arsenideand the surface of the substrate is preferably substantially parallel to{111}A planes that are formed by gallium atoms.

In another preferred embodiment of the present invention, the step b)preferably includes the step of dry-etching the surface of the substrateanisotropically with an etching gas including a halogen compound.

In a specific preferred embodiment, the etching gas may include acompound of arsenic and bromine.

In an alternative preferred embodiment, the etching gas may include acompound of arsenic and chlorine.

In still another preferred embodiment, the step b) preferably includesthe step of dry-etching the surface of the substrate under such anetching condition as to fall within a surface-reaction-limited range.

In yet another preferred embodiment, the step b) preferably includes thestep of dry-etching the surface of the substrate with not only theetching gas but also an arsenic gas as well.

In yet another preferred embodiment, the method preferably furtherincludes, between the steps a) and b), the step c) of covering thesurface of the substrate with an etching mask layer. The etching masklayer preferably includes at least one masking element and at least oneopening that are arranged to form a predetermined pattern.

In this particular preferred embodiment, the step b) preferably includesthe step of forming the unit elements of the micro corner cube arraysuch that the size of each of the unit elements is controlled accordingto the pattern of the etching mask layer that has been defined in thestep c).

In yet another preferred embodiment, the step b) preferably includes thestep of forming the unit elements such that each of the unit elements ismade up of three substantially square planes that are opposedsubstantially perpendicularly to each other.

In yet another preferred embodiment, the method may further include thestep of transferring the shape of the unit elements, which have beenformed on the surface of the substrate, to a resin material.

Another preferred embodiment of the present invention provides a microcorner cube array that is made by the method according to any of thepreferred embodiments of the present invention described above.

Still another preferred embodiment of the present invention provides adisplay device. The display device preferably includes the micro cornercube array according to any of the preferred embodiments of the presentinvention described above and a light modulating layer provided on themicro corner cube array.

In one preferred embodiment of the present invention, the micro cornercube array preferably includes a plurality of corner cubes as the unitelements, and a size of each of the corner cubes is preferably equal toor smaller than that of each pixel region.

Other features, elements, processes, steps, characteristics andadvantages of the present invention will become more apparent from thefollowing detailed description of preferred embodiments of the presentinvention with reference to the attached drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A through 1H are cross-sectional views illustrating respectiveprocess steps for making a micro corner cube array according to a firstspecific preferred embodiment of the present invention.

FIG. 2 is a plan view illustrating a photomask for use in the process ofmaking the micro corner cube array of the first preferred embodiment.

FIG. 3 is a cross-sectional view illustrating an etching system for usein the process of making the micro corner cube array of the firstpreferred embodiment.

FIGS. 4A and 4B are respectively a plan view and a perspective viewillustrating a micro corner cube array obtained by the method of makinga micro corner cube array according to the first preferred embodiment.

FIG. 5 is a graph showing how the etch rates of {111}A and {100} planesof GaAs single crystals change with the temperature of the substrateaccording to a second specific preferred embodiment of the presentinvention.

FIG. 6 is a graph showing how the etch rate ratio of the {111}A planesto the {100} planes of GaAs single crystals changes with the temperatureof the substrate according to the second preferred embodiment of thepresent invention.

FIGS. 7A and 7B are cross-sectional views of a substrate that was etchedwith its temperature retained at about 380° C. and a substrate that wasetched with its temperature retained at about 600° C., respectively,according to a third specific preferred embodiment of the presentinvention.

FIG. 8 is a cross-sectional view illustrating a display device accordingto a fourth specific preferred embodiment of the present invention.

FIGS. 9A and 9B are respectively a perspective view and plan viewsillustrating an array of corner cubes, each consisting of threerectangular isosceles triangular planes.

FIGS. 10A and 10B are respectively a perspective view and plan viewsillustrating an array of corner cubes, each consisting of three squareplanes.

FIG. 11 is a cross-sectional view illustrating a configuration for aconventional reflective liquid crystal display device including a microcorner cube array.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

In a method of making a micro corner cube array according to a preferredembodiment of the present invention, a micro corner cube array is formedon a single crystalline substrate consisting of cubic crystals (whichwill be herein referred to as a “cubic single crystalline substrate”).The cubic single crystalline substrate may be made of a compoundsemiconductor having a sphalerite structure or a material having adiamond structure, for example. More specifically, a cubic singlecrystalline substrate, having a surface that is substantially parallelto {111} planes of the crystals, is prepared and has that surfacepatterned by an anisotropic dry etching process, thereby making a microcorner cube array.

It should be noted that the “substrate having a surface that issubstantially parallel to {111} planes of crystals” herein refers to notonly a substrate having a surface that is parallel to the {111} planesof the crystals but also a substrate having a surface that defines atilt angle of about 0 degrees to about 10 degrees with the {111} planesof the crystals.

The method of the present invention is partly characterized bypatterning the surface of the substrate by an anisotropic dry etchingprocess such that the etch rate of one family of crystal planes isdifferent from that of another. For example, if a single crystallinesubstrate of GaAs is dry-etched with a reactive etching gas such as agas of a halogen compound, the etch rate of {111}A planes of thecrystals (i.e., {111} planes formed by gallium atoms) is relativelyhigh, while the etch rate of {100} planes (i.e., crystal planesincluding (100), (010) and (001) planes) thereof is relatively low.Accordingly, if the {111}A planes of a GaAs substrate are exposed andsubjected to the dry etching process, then the dry etching processadvances anisotropically in such a manner as to leave the {100} planesof the crystals. As a result, concavo-convex portions are defined on thesurface of the substrate by multiple unit elements such that each unitelement is made up of three {100} planes of the crystals. As usedherein, each “unit element”, defined by a {100} family of planes, willalso be referred to as a “concave portion” because the element is formedby an anisotropic etching process. Each of those unit elements obtainedin this manner has three perpendicularly opposed planes (e.g., (100),(010) and (001) planes), thus forming a corner cube.

In a corner cube array formed by such a method, the three planes of eachcorner cube are {100} crystallographic planes of a cubic crystal andexhibit very high shape precision. Also, the three planes that make upeach corner cube have good planarity, and each corner or edge, at whichtwo or three of the planes intersect with each other, has sufficientsharpness. Furthermore, the corner cube array has a stereoscopic shapein which multiple unit elements, or corner cubes, are arranged in aregular pattern. In this array, the respective vertices of the cornercubes are located at substantially the same level (or withinsubstantially the same plane). Thus, such a corner cube array can beused effectively as a retroreflector for reflecting an incoming lightray back to its source.

Also, the size of each unit element (i.e., each corner cube) of thecorner cube array formed by the method of the present invention may beseveral tens μm or less by adjusting the feature size of a photoresistpattern (or resist mask) used in the etching process. Accordingly, acorner cube array having a very small size, which is suitably applicablefor use as a retroreflector for a liquid crystal display device, forexample, can be obtained.

It should be noted that the “cubic single crystalline substrate” used invarious preferred embodiments of the present invention includes asubstrate that is prepared by forming a single crystal layer on asupporting base member of an amorphous or polycrystalline material.Also, the substrate does not have to be a flat plate but may have anyother stereoscopic shape as long as the substrate has a flat surface.

Hereinafter, preferred embodiments of the present invention will bedescribed with reference to the accompanying drawings.

Embodiment 1

In a first specific preferred embodiment of the present invention, aGaAs substrate is used as a cubic single crystalline substrate, on whicha micro corner cube array should be formed.

FIGS. 1A through 1H illustrate respective process steps for making amicro corner cube array according to the first preferred embodiment ofthe present invention. First, as shown in FIG. 1A, a substrate 1, whichconsists of GaAs single crystals and of which the surface is one of{111}A planes, is prepared, and has that surface mirror-polished. Itshould be noted that the {111}A planes are formed by gallium atoms,while {111}B planes are formed by arsenic atoms.

Next, as shown in FIG. 1B, an SiO₂ film 3 is deposited to a thickness ofabout 3,000 Å on the substrate 1 by a CVD process. Then, the SiO₂ film 3is spin-coated with a resist film 5 with a thickness of about 2 μm asshown in FIG. 1C. The resist film 5 may be made of OFPR-800 (produced byTokyo Ohka Kogyo Co., Ltd.), for example.

Subsequently, after the resist film 5 has been pre-baked, a photomaskhaving a predetermined pattern is disposed over the resist film 5,thereby selectively exposing the resist film 5 to a radiation anddeveloping the resist film 5. In this manner, a predetermined resistmasking pattern 5 a is defined on the SiO₂ film 3 as shown in FIG. 1D.

In this preferred embodiment, a photomask such as that shown in FIG. 2may be used. As shown in FIG. 2, in this photomask, equilateraltriangular opaque regions 9 a and inverse equilateral triangulartransparent regions 9 b are alternately arranged in each of the threedirections defined by the three sides of the triangles. The photomask ispreferably disposed over the substrate so that one of the three sides(or edges) of each equilateral triangular opaque region 9 a of thephotomask is parallel to the (100) plane of the GaAs crystal. In thispreferred embodiment, each equilateral triangular pattern element of thephotomask has a length of about 10 μm each side.

Next, the substrate with the resist masking pattern 5 a thereon iswet-etched with a buffered hydrofluoric acid (HF) so that the resistmasking pattern 5 a is transferred onto the SiO₂ film 3. In this manner,an SiO₂ masking pattern 3 a is defined on the substrate 1 as shown inFIG. 1E. Thereafter, the resist masking pattern 5 a is stripped bywashing the substrate with an organic solvent such as acetone and thenthe SiO₂ film 3 is heated to about 200° C. by an oven so as to bedehydrated as shown in FIG. 1F. As a result, an etching mask layer 3 ato be used in a subsequent dry etching process is obtained as the SiO₂masking pattern 3 a. The SiO₂ masking pattern 3 a that has been formedin this manner has the same pattern as the photomask shown in FIG. 2.

In this preferred embodiment, the size of corner cubes to be formed isdetermined by the feature size of the SiO₂ masking pattern 3 a. Morespecifically, the size of the corner cubes to be formed becomesapproximately equal to the pitch between the centers of mass of twoadjacent masking elements of the SiO₂ masking pattern 3 a. In thispreferred embodiment, the pitch is preferably about 10 μm.

Next, the GaAs substrate 1, including the SiO₂ masking pattern 3 athereon, is loaded into an etching system 30 such as that shown in FIG.3, thereby dry-etching the surface of the substrate 1.

More specifically, the substrate 1 is fixed on a heater 6 of the etchingsystem 30 and then the system is evacuated to a vacuum of about 1×10⁻⁹Torr with a vacuum pump 7. Next, the GaAs substrate 1 is heated by theheater 6 to about 590° C. and retained at the temperature forapproximately 30 minutes while arsenic gas is supplied from an arsenicgas supplier 9 into the chamber. In this manner, a natural oxide filmthat has been formed on the surface of the GaAs substrate 1 is removed.Then, the supply of the arsenic gas is stopped and the temperature ofthe substrate is decreased to about 380° C. Thereafter, an etching gasis introduced from an etching gas supplier 8 into the chamber forapproximately 10 hours, thereby dry-etching the surface of the substrate1 anisotropically. In this preferred embodiment, arsenic tribromide gasis used as the etching gas. Alternatively, arsenic trichloride gas orany other suitable gas may also be used as the etching gas.

To etch the surface of the substrate anisotropically by this dry etchingprocess, the etching gas used needs to be chemically reactive with thesubstrate. When a reactive etching gas is used, a chemical reactionoccurs between the surface of the substrate and the etching gas. In thatcase, the reactivity of the etching gas with a family of crystal planesof the substrate is different from that of the same etching gas withanother family of crystal planes thereof. Thus, those two families ofcrystal planes are etched at mutually different etch rates. As a result,the surface of the substrate is dry-etched anisotropically.

Also, the etching gas used preferably produces a gaseous reactant havinga high vapor pressure when reacted with the substrate.

For these reasons, a gas of a halogen compound such as the arsenictribromide or trichloride gas described above is preferably used as theetching gas. Examples of other preferred gases that satisfy theseconditions include hydrogen gas.

The technique of etching a GaAs substrate with an etching gas of ahalogen compound has already been known in the art. For example, anetching process using hydrogen chloride gas is described in SurfaceScience 312, 181 (1994). An etching process using hydrogen trichlorideis described in Journal of Crystal Growth 164, 97 (1994). Also, a methodof etching a GaAs substrate with an etching gas of arsenic tribromide isdescribed in Japanese Laid-Open Publication No. 8-321483. Each of thesedocuments discloses that the etching process can be carried out withvery high precision by using a halogen compound as an etchant. In thispreferred embodiment, such a high-precision etching technique is used tomake a micro corner cube array, thereby obtaining a reflector with avery high retro-reflectivity.

In the dry etching process of this preferred embodiment, the {100}planes of the GaAs single crystals, including the (100), (010) and (001)planes, are less easy to etch than the {111}A planes thereof. Thus, theetching process advances anisotropically so as to leave the {100}planes. In this preferred embodiment, the substrate is dry-etched withan etching gas including a halogen compound. Accordingly, the exposed{100} planes have good planarity.

Thereafter, when the substrate 1 has been etched to the intended depthas shown in FIG. 1G, concavo-convex portions 20, consisting of the {100}planes S of the GaAs single crystals, will be formed as shown in FIGS.4A and 4B. FIGS. 4A and 4B are respectively a plan view and aperspective view of the concavo-convex portions 20 that have been formedin this manner. As shown in FIGS. 4A and 4B, a plurality ofconcavo-convex portions, each consisting of three substantiallyperpendicularly opposed {100} planes S of GaAs single crystals, areformed so as to correspond to the masking elements 3 b and openings 3 cof the etching mask layer (i.e., the SiO₂ masking pattern) 3 a. In thismanner, a micro corner cube array is obtained. It should be noted thatwhen the micro corner cube array is formed on the substrate 1 at the endof this etching process, the SiO₂ masking pattern 3 a and theconcavo-convex portions 20 on the surface of the substrate are in pointcontact with each other as shown in FIG. 1G. Thus, the SiO₂ maskingpattern 3 a is stripped by itself from the substrate 1 as shown in FIG.1H.

As can be seen from FIGS. 4A and 4B, the micro corner cube arrayobtained in this manner has a stereoscopic shape in which multipleconvex portions (of which the vertices are indicated by the open circles◯) and multiple concave portions (of which the bottoms are indicated bythe solid circles ●) are combined with each other. Also, each of itsunit elements (i.e., each of the corner cubes of the array) is made upof three substantially square planes that intersect with each other atthe bottom and that are opposed substantially perpendicularly to eachother. As shown in FIG. 4A, each unit element, or corner cube, has asubstantially hexagonal planar shape as view from over the substrate 1.Thus, the corner cubes formed by the method of this preferred embodimenthave a relatively complex shape. However, the corner cubes of thispreferred embodiment have a very small size of about 10+μm. In addition,the shape precision (e.g., the planarity of each of the threesubstantially square planes) thereof is also very high.

In the preferred embodiment described above, the corner cube array isformed by using arsenic tribromide gas as an etching gas. However, asimilar corner cube array can also be obtained by using arsenictrichloride gas as an alternative etching gas.

When this micro corner cube array is used to make a retroreflector, athin film of a reflective material (e.g., aluminum or silver) may bedeposited by an evaporation process, for example, to a substantiallyuniform thickness (e.g., about 200 nm) over the rugged surface of theGaAs substrate. In this manner, a retroreflector, including threesubstantially square reflective planes that are opposed substantiallyperpendicularly to each other, can be obtained.

Optionally, the pattern of the micro corner cube array that has beenformed on the surface of the GaAs substrate may be transferred onto aresin material, for example, thereby making a micro corner cube array ofthe resin material. More specifically, first, an electroformed mold ismade by a known technique from the GaAs substrate on which the cornercube array has been formed as described above. Next, this electroformedmold is attached onto a roller, for example. And then the electroformedmold is rotated by the roller and pressed against the resin, therebytransferring the pattern of the micro corner cube array onto the resinmaterial.

In the preferred embodiment described above, the substrate on which thecorner cube array is formed consists of GaAs single crystals.Alternatively, as long as an appropriate etching gas is used, thesubstrate may also consist of single crystals of any other compoundhaving either a sphalerite structure, e.g., InP, InAs, ZnS or GaP, or adiamond structure such as Ge.

Embodiment 2

Hereinafter, it will be described how the etch rate may change with thetemperature of the GaAs substrate in the anisotropic dry etching processof the first preferred embodiment described above.

FIG. 5 is a graph showing how the etch rates of the {111}A and {100}planes of the GaAs single crystals change with the temperature of thesubstrate when arsenic tribromide gas is used as the etching gas. FIG. 6is a graph showing how the ratio (V_(111A)/V₁₀₀ ) of the etch rateV_(111A) of the {111}A planes to the etch rate V₁₀₀ of the {100} planeschanges with the temperature of the substrate.

As can be seen from FIG. 5, if the temperature of the substrate is about400° C. or less, the etch rates change relatively steeply with thetemperature of the substrate. On the other hand, if the temperature ofthe substrate is higher than about 400° C., the etch rates change onlyslightly with the temperature of the substrate. The range where the etchrates change steeply will be herein referred to as a“surface-reaction-limited range” while the range where the etch rateschange just slightly, or even hardly, will be herein referred to as a“mass-transport-limited range”.

It should be noted that the “surface-reaction-limited range” may bedefined by any of various parameters that determine the etchingconditions (e.g., the substrate temperature or the pressure at which theetching gas is supplied). That is to say, each of those parameters mayhave its own range where the etch rate changes steeply, i.e., such arange may be defined as the “surface-reaction-limited range” for each ofthose parameters. As used herein, the “surface-reaction-limited range”refers to an etching condition range in which the highest etch rate of afamily of crystal planes is about 1.1 times or more as high as thelowest etch rate of another family of planes.

Also, as can be seen from FIGS. 5 and 6, the ratio (V_(111A)/V₁₀₀ ) ofthe etch rate V_(111A) of the {111}A planes to the etch rate V₁₀₀ of the{100} planes is large in the surface-reaction-limited range of about400° C. or less. Meanwhile, in the mass-transport-limited rangeexceeding about 400° C., the etch rate ratio (V_(111A)/V₁₀₀ ) is verysmall. Thus, it can be seen that to increase the etch rate ratio(V_(111A)/V₁₀₀ ), the etching process is preferably carried out in thesurface-reaction-limited range of about 400° C. or less.

FIGS. 7A and 7B are cross-sectional views illustrating a corner cubethat was formed by etching the substrate at about 380° C. falling withinthe surface-reaction-limited range and a corner cube that was formed byetching the substrate at about 600° C. falling within themass-transport-limited range, respectively. As shown in FIG. 7A, whenthe substrate temperature is about 380° C. and the etch rate ratio ofthe {111}A planes to the {100} planes is large, the corner cube formedby the etching process has a sharp corner (i.e., a vertex) and planeswith good planarity. On the other hand, when the substrate temperatureis about 600° C. and the etch rate ratio of the {111}A planes to the{100} planes is small, the corner cube formed by the etching process hasa rounded corner and curved surfaces as shown in FIG. 7B. In thismanner, if the etch rate of the {111}A planes is not sufficiently higherthan that of the {100} planes, the resultant corner cube has decreasedshape precision.

When the corner cube obtained has such curved surfaces or roundedcorner, a retroreflector to be made from such a corner cube should havedecreased retro-reflectivity. Accordingly, the etching process ispreferably carried out under such an etching condition (e.g., substratetemperature or pressure at which the etching gas is supplied) asresulting in a sufficiently high etch rate ratio. In this preferredembodiment, the ratio (V_(111A)/V₁₀₀ ) of the etch rate V_(111A) of the{111}A planes to the etch rate V₁₀₀ of the {100} planes is preferably atleast about 1.7, more preferably at least about 3.4.

Also, to obtain such a high etch rate ratio, the temperature of thesubstrate during the etching process is preferably about 350° C. toabout 400° C., more preferably about 350° C. to about 385° C.

As described above, if the etch rate ratio (V_(111A)/V₁₀₀ ) issufficiently high, a corner cube array with high shape precision can beformed. Also, if the etch rate ratio is increased sufficiently, the{100} crystallographic planes are exposed by themselves. Thus, othernecessary conditions (e.g., the shape precision of the etching masklayer) on the etching process may be relaxed, or do not have to becontrolled so strictly, which is advantageous for the overallmanufacturing process.

Also, when a dry etching process is adopted as is done in this preferredembodiment, the difference in etch rate between two families of crystalplanes (i.e., the etch rate ratio) can be increased more easily than amethod in which a wet etching process is adopted. A method of making acorner cube by wet-etching a substrate with a mixture of ammonia waterand hydrogen peroxide water was disclosed by the applicant of thepresent application in Japanese Patent Application No. 2001-306052. In awet etching process, it is rather difficult to realize an etch rateratio of about 3.4 or more between the {111} and {100} families ofcrystal planes. However, such a high etch rate ratio is easilyrealizable by a dry etching process. When the etch rate ratio is thathigh, {100} planes with good planarity can be formed easily and theretro-reflectivity can be further increased. In addition, compared tothe wet etching process, the etching mask layer is less likely strippedin the dry etching process before the corner cubes are formed in theirintended shape. Thus, an array of corner cubes with desired sharpvertices can be formed over a broad area. The present inventorsconfirmed via experiments that the corner cubes that had been formed bya wet etching process had a retro-reflectivity of about 71% whereas thecorner cubes that had been formed by a dry etching process as in thepreferred embodiments of the present invention described above had aretro-reflectivity of about 79%.

Embodiment 3

A third specific preferred embodiment of the present invention is avariation of the anisotropic dry etching process of the first preferredembodiment described above. Specifically, in this preferred embodiment,the dry etching process is carried out with not only the etching gas butalso arsenic gas supplied in combination.

In this preferred embodiment, after the etching mask layer (i.e., theSiO₂ masking pattern) 3 a with the predetermined pattern has beenformed, a similar dry etching process is carried out in the etchingsystem as in the first preferred embodiment described above. The dryetching process is carried out on the substrate having a temperature ofabout 380° C. as in the first preferred embodiment described above. Inthis third preferred embodiment, however, the substrate issimultaneously exposed to not just the arsenic tribromide gas but alsoarsenic gas as respective etching gases. The arsenic gas is suppliedfrom the arsenic gas supplier 9 by heating the source of arsenic toabout 203° C.

The present inventors discovered that when the substrate wasadditionally exposed to the arsenic gas as well as the arsenictribromide gas, the ratio (V_(111A)/V₁₀₀ ) of the etch rate V_(111A) ofthe {111}A planes to the etch rate V₁₀₀ of the {100} planes could beincreased than the embodiment where the substrate was exposed to thearsenic tribromide gas only. The results are shown in the followingTable 1:

TABLE 1 V_(111A)/V₁₀₀ No arsenic gas supplied 4.6 Arsenic gas supplied6.1

In this manner, if the substrate being etched is additionally exposed tothe arsenic gas, the etch rate ratio (V_(111A)/V₁₀₀ ) can be increased,and a corner cube having even higher shape precision can be formed.

In this preferred embodiment, the dry etching process is supposed to becarried out with not only the etching gas (e.g., arsenic tribromide ortrichloride gas) but also the arsenic gas supplied simultaneously.Alternatively, the dry etching process may also be carried out with theetching gas and Ga gas supplied in combination.

If the etching gas and the Ga gas are supplied simultaneously during thedry etching process, then the concavo-convex portions to be formed onthe surface of the substrate can have further planarized planes. Thepresent inventors discovered and confirmed via experiments that whenonly the arsenic tribromide gas was supplied as the etching gas for theanisotropic dry etching process, the concavo-convex portions had asurface roughness of about 5.4 nm. On the other hand, when the arsenictribromide gas and Ga gas (i.e., a Ga source gas that was heated toabout 890° C.) were supplied simultaneously as etching gases for theanisotropic dry etching process, the concavo-convex portions could haveits surface roughness decreased to about 0.2 nm.

Embodiment 4

Hereinafter, a fourth specific preferred embodiment of the presentinvention will be described. The fourth preferred embodiment relates toa reflective liquid crystal display device that uses, as aretroreflector, a micro corner cube array obtained by any of the methodsdescribed for the first through third preferred embodiments of thepresent invention.

FIG. 8 illustrates a configuration for a reflective liquid crystaldisplay device 100 according to the fourth preferred embodiment. Asshown in FIG. 8, this liquid crystal display device 100 includes a pairof substrates 80 and 90 and a scattering type liquid crystal layer 60,which is provided as a light modulating layer between the substrates 80and 90. The substrate 80 is located closer to the viewer, while thesubstrate 90 is provided so as to face the substrate 80. These twosubstrates 80 and 90 are both made of a transparent material and may beglass plates or polymer films, for example.

On one surface of the substrate 80 that is opposed to the liquid crystallayer 60, a color filter layer 70, including R, G and B color filters,and a transparent electrode 65 are stacked in this order. On the otherhand, on one surface of the substrate 90 that is opposed to the liquidcrystal layer 60, a micro corner cube array 20 is provided. This microcorner cube array 20 is covered with a reflective electrode 25, which ismade of a material with a high surface reflectivity (e.g., silver oraluminum) and which has a substantially uniform thickness. Thereflective electrode 25 may be formed so as to come into close contactwith the rugged surface of the micro corner cube array 20 by depositingsilver to a thickness of about 200 nm by an evaporation process, forexample. The reflective electrode 25 serves not only as reflectiveplanes for reflecting the incoming light back to its source but also asan electrode for applying a voltage to the liquid crystal layer 60.

The liquid crystal display device 100 having such a configurationdisplays an image thereon by controlling the light modulating states ofthe liquid crystal layer 60 on a pixel-by-pixel basis with a voltageapplied from the transparent electrode 65 and reflective electrode 25 tothe liquid crystal layer 60. The electrodes 65 and 25 may be driveneither by known active components such as thin-film transistors or byany other driver.

In the preferred embodiment illustrated in FIG. 8, the micro corner cubearray 20 is formed on the substrate 90. Alternatively, the micro cornercube array 20 itself may be used as a substrate without providing thesubstrate 90. As already described for the first preferred embodiment,the micro corner cube array 20 may be formed out of a GaAs substrate.When a GaAs substrate is used, a circuit for driving the activecomponents and other circuits may be integrated together on the samesubstrate around the display area thereof, for example. If the drivercircuit and other circuits can be provided on the same substrate, thenthe overall size of the display device can be reduced.

In this preferred embodiment, the scattering type liquid crystal layer60 is made of a polymer-dispersed liquid crystal material. However, thematerial of the liquid crystal layer 60 is not limited thereto, but mayalso be any other scattering type liquid crystal material such as anematic-cholesteric phase change type liquid crystal material or aliquid crystal gel. Furthermore, the liquid crystal layer 60 may also bemade of any of various other liquid crystal materials as long as thematerial allows the liquid crystal layer 60 to switch between a mode totransmit the incoming light and a mode to scatter the light at least.Specifically, examples of other usable liquid crystal materials include:a cholesteric liquid crystal material, which can switch betweentransmitting and reflecting states and to which diffusion properties areimparted by controlling the domain sizes of liquid crystal molecules;and a polymer-dispersed liquid crystal material with a holographicfunction, which switches between transmitting and reflecting states andto which diffusion properties are imparted by exposing the material todiffusing radiation.

The polymer-dispersed liquid crystal material used in this preferredembodiment is obtained by preparing a mixture of a low-molecular-weightliquid crystal composition and an unpolymerized prepolymer in a misciblestate, injecting the mixture into the gap between the substrates, andthen polymerizing the prepolymer. Any type of polymer-dispersed liquidcrystal material may be used as long as the material is obtained bypolymerizing a prepolymer. In this preferred embodiment, a mixture of aUV-curing prepolymer with liquid crystalline properties and a liquidcrystal composition is photo-cured by being exposed to an active raysuch as an ultraviolet ray, and the cured mixture (i.e., a UV-curedliquid crystal material) is used as the polymer-dispersed liquid crystalmaterial. If such a UV-cured liquid crystal material is used as thepolymer-dispersed liquid crystal material, the polymerizable liquidcrystal material may be polymerized without being heated. Thus, othermembers of the liquid crystal display device are not affected by theheat generated.

The prepolymer-liquid crystal mixture may be obtained by adding a smallamount of polymerization initiator (produced by Ciba-Geigy Corporation,for example) to a mixture of a UV-curing material and a liquid crystalcomposition that have been mixed at a weight ratio of about 20:80, forexample. The prepolymer-liquid crystal mixture obtained in this mannerexhibits a nematic liquid crystalline phase at room temperature. Onentering a liquid crystal layer made of such a material, the incominglight is modulated in accordance with the mode (i.e., scattering ortransmitting mode) of the liquid crystal layer that changes with thevoltage applied thereto. In this preferred embodiment, the liquidcrystal layer exhibits the scattering state when no voltage is appliedthereto and the transmitting state when a voltage is applied thereto.

Hereinafter, it will be described specifically how the reflective liquidcrystal display device 100 operates.

First, the operation of the display device 100 in a white display modewill be described. In the white display mode, the liquid crystal layer60 is controlled to exhibit the scattering state. Thus, externallyincoming light is scattered by the liquid crystal layer 60 after havingbeen transmitted through the substrate 80 and the color filter layer 70.In this case, a part of the incoming light, which has been backscatteredby the liquid crystal layer 60, returns to the viewer. Also, in thedisplay device of this preferred embodiment, another part of theincoming light that has been transmitted straight through the liquidcrystal layer 60 and still another part of the incoming light that hasbeen forward scattered by the liquid crystal layer 60 are reflected bythe reflective electrode 25 on the micro corner cube array 20. Thereflected parts of the light are scattered again by the liquid crystallayer 60 in the scattering state while passing through the liquidcrystal layer 60. As a result, a part of the scattered light returns tothe viewer. In this manner, in the white display mode, not only thebackscattered light but also a part of the forward scattered lightreturn to the viewer, thus realizing display of a highly bright image.

Next, the operation of the display device 100 in a black display modewill be described. In the black display mode, the liquid crystal layer60 is controlled to exhibit a transmitting state by being supplied witha voltage. In such a situation, externally incoming light is transmittedthrough the substrate 80, color filter layer 70 and liquid crystal layer60. The light that has been transmitted through the liquid crystal layer60 is retro-reflected by the reflective electrode 25 on the micro cornercube array 20. That is to say, before entering the eyes of the viewerwho is watching an image on the display, the incoming light is refractedby the substrate 80 and liquid crystal layer 60, retro-reflected fromthe micro corner cube array 20 and then refracted by the liquid crystallayer 60 and substrate 80 again. Thus, only the light that has come fromthe vicinity of the viewer's eyes goes out of this display device 100toward the viewer. In this case, if the vicinity of the viewer's eyes istoo narrow a region to allow any light source to be present there (i.e.,if that region is smaller in area than the viewer's pupil), then goodblack display is realized.

As described above, the light that has been incident onto the microcorner cube array 20 is reflected back in the direction that isprecisely opposite to the direction in which the incoming light hastraveled. However, the retro-reflected outgoing light ray is slightlyshifted horizontally (or translated) from the incoming light ray. Theshift is approximately equal to the size (or pitch) of unit elements ofthe micro corner cube array 20. Accordingly, if the size of unitelements of the micro corner cube array 20 is greater than the size ofpixel regions, then the color of a color filter that the incoming lightray passes may be different from that of a color filter that theoutgoing light ray passes, thus causing a color mixture unintentionally.

On the other hand, if the size of unit elements of the micro corner cubearray 20 is smaller than the size of pixel regions, then the color of acolor filter that the incoming light ray passes should be the same asthat of the color filter that the outgoing light ray passes, thuscausing no color mixture. Accordingly, to display an image in desiredcolors, the size of unit elements of the micro corner cube array 20needs to be smaller than the size of pixel regions. In the micro cornercube array 20 for use in this preferred embodiment, the size of unitelements (e.g., about 10 μm) is defined sufficiently smaller than anormal size of a pixel region (e.g., several tens μm). Thus, an imagecan be appropriately displayed in desired colors.

Next, the retro-reflectivity of a light ray that has been incidentstraight onto a corner cube consisting of three rectangular isoscelestriangular planes will be compared with that of a light ray that hasbeen incident straight onto a corner cube consisting of three squareplanes. A retroreflector in which each corner cube consists of threerectangular isosceles triangular planes is described in JapaneseLaid-Open Publication No. 7-205322.

FIGS. 9A and 9B are respectively a perspective view and a plan viewillustrating a situation where each corner cube consists of threerectangular isosceles triangular planes. In the situation where eachcorner cube consists of three rectangular isosceles triangular planes,the corner cube has an equilateral triangular planar shape as shown inFIG. 9B. In that case, if a light ray is incident onto a point of thecorner cube near one of the vertices of the equilateral triangle, thenthe light ray is not retro-reflected because inside the corner cube,there is no point that is symmetric to the point of incidence withrespect to the center of the corner cube. Accordingly, theretro-reflectivity is at most about 66%.

On the other hand, FIGS. 10A and 10B are respectively a perspective viewand a plan view illustrating a situation where each corner cube consistsof three square planes. In the situation where each corner cube consistsof three square planes, the corner cube has a rectangular hexagonalplanar shape as shown in FIG. 10B. In that case, no matter where thelight ray is incident, each and every point of incidence has a pointthat is symmetric with respect to the center of the corner cube.Accordingly, a light ray that has been incident onto any point of therectangular hexagon is always retro-reflected. Thus, it can be seen thatto increase the retro-reflectivity of an incoming light ray, each of themicro corner cubes in an array preferably consists of three squareplanes and preferably has a rectangular hexagonal planar shape.

In the micro corner cube array for use in this preferred embodiment,each unit element thereof consists of three substantially square planes,defined by {100} planes of cubic single crystals, as described above.Thus, the micro corner cube array can retro-reflect the incoming lightjust as intended. That is to say, in the black display mode, the viewersenses no unwanted light. As a result, appropriate dark display isrealized and the contrast ratio increases.

In the preferred embodiment described above, the micro corner cube arrayaccording to the preferred embodiment of the present invention isapplied to a liquid crystal display device. Alternatively, aretroreflector, made from the micro corner cube array according to thepreferred embodiment of the present invention, may be provided behind alight emitter such as an EL device.

As another alternative, a micro corner cube array, having an opticalaxis that is tilted away from a normal to the reference plane of a basematerial, may also be made. Specifically, first, a GaAs substrate,having a surface that defines a tilt angle of about 0 degrees to about10 degrees with the (111)A plane of GaAs crystals, is prepared. Next,the GaAs substrate prepared is subjected to the mirror polishing,photoresist pattern definition and dry etching process steps as in thefirst preferred embodiment described above, thereby forming multiplecorner cubes, each being made up of three {100} crystal planes that areopposed substantially perpendicularly to each other (e.g., (100), (010)and (001) planes), on the surface of the substrate. In this manner, acorner cube array is obtained. In this preferred embodiment, however,the GaAs substrate has a surface that is tilted away from {111}A planesof the crystals by about 0 degrees to about 10 degrees unlike the firstpreferred embodiment described above. Accordingly, the angle that isdefined by each of the three planes of a corner cube with the referenceplane of the substrate (i.e., the original surface of the substrate yetto be etched) is different from that of the first preferred embodiment.

If the corner cube array that has been formed in this manner on thesurface of the GaAs substrate is coated with a reflective film asalready described for the first preferred embodiment, then the cornercube array may be used as a retroreflector. The retroreflector obtainedin this manner has an optical axis that is tilted away from a normal tothe reference plane of the substrate, and exhibits the highestretro-reflectivity with respect to an incoming light ray that has beenincident along the tilted optical axis. Thus, depending on the operatingenvironment of a display device (when the light source is located at afixed position, for example), higher display performance is realized byusing such a retroreflector.

According to the present invention, a micro corner cube array is made bydry-etching the {111} planes of a cubic single crystalline substrateanisotropically such that each of multiple unit elements is made up ofcrystallographic planes that have been exposed at a relatively low etchrate (e.g., {100} planes). Thus, a micro corner cube array, consistingof very small unit elements that have a size even smaller than that of apixel region of the display device (e.g., about several tens μm) and yetexhibiting very high shape precision, can be made through relativelysimple process steps.

A display device including such a micro corner cube array can display abright image at a high contrast ratio, a high color purity and highlyvisibility.

While the present invention has been described with respect to preferredembodiments thereof, it will be apparent to those skilled in the artthat the disclosed invention may be modified in numerous ways and mayassume many embodiments other than those specifically described above.Accordingly, it is intended by the appended claims to cover allmodifications of the invention that fall within the true spirit andscope of the invention.

1. A micro corner cube array comprising: a substrate, at least a surfaceportion of which comprises cubic single crystals; a plurality of unitelements of the micro corner cube array, at least some of said unitelements including a number of crystal planes of the cubic singlecrystals that have been etched at a lower dry etch rate than {111 }planes of the cubic single crystals; and wherein the crystal planes ofthe at least some of said unit elements include three square {100}planes of the cubic single crystals, the ratio (V₁₀₀/V_(111A)) of thedry etch rate V₁₀₀ of the {100} planes of the cubic single crystals tothe dry etch rate V_(111A) of the {111}A planes of the cubic singlecrystals being 1/3.4 or less.
 2. A display device comprising: the microcorner cube array as recited in claim 1; and a light modulating layerprovided on the micro corner cube array.
 3. The display device of claim2, wherein the display device comprises pixels, each of which is definedby a pixel region; and wherein the micro corner cube array comprises aplurality of corner cubes as the unit elements, and wherein a size ofeach said corner cube is equal to or smaller than that of each pixelregion.